Outstanding Pressure Control Under All Conditions

The 61.3 HV Butterfly Control Valve provides outstanding pressure control performance. With its fast and precise acting motion controller (0.1 s) it’s the perfect solution for fine control in CVD and ALD processes. The plate acts as a throttling element and varies the conductance of the valve opening. The integrated pressure controller of the 61.3 calculates the required plate position to achieve the set pressure as fast as possible.

It is especially designed for harsh downstream processes with particle in the gas stream. The 61.3 stays fully operational despite high particle loads and debris accumulation by design.

Already installed in thousands of demanding applications under various process conditions, the 61.3 series has proven its outstanding reliability. With a robust design and direct mounting option, as well as reduced and easy maintenance, the 61.3 series convinces in all aspects.

Various design options in body material, surface treatment, elastomers, flange connections, special sizes as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) simplify the integration into various vacuum applications.

VAT
VAT

61.3 HV Butterfly Control Valves is available in aluminum or stainless steel, with standard flange connectors in ISO-KF and ISO-F. Customer-specific flanges can be integrated as well as special features like an integrated heater with insulation. Various FFKM/FKM elastomers are available on request (FKM is standard).

Key features of the 61.3 HV Butterfly Control Valve

Features:

    • Excellent pressure control
    • Very fast operation
    • On-board software for local operation
    • Reliable operation in harsh process conditions

Benefits:

    • Better process controllability
    • High uptime / unrestricted performance
    • Low cost of operations
  • Technical data
  • Downloads
Sizes  DN 25 (1’’) DN 40 (1½’’), DN 50 (2’’),
DN 63 (2½"), DN 80 (3"), DN 100 (4"),
DN 160 (6"), DN 200 (8"), DN 250 (10"),
DN 320 (12")
Actuator  Integrated controller with Stepper Motor
Body Material  Aluminum or Stainless Steel
Standard Flanges  ISO-KF, ISO-F
Leak Rate Valve BodyAluminium < 1 × 10-9 mbar ls-1
 Stainless Steel < 1 × 10-9 mbar ls-1
Pressure Range  1 × 10-8 mbar to 1.2 bar (abs)
Cycles until first Service1)Pressure Controll 2 Million
TemperatureValve Body
Controller		 ≤ 150 °C
Max. 50°C (≤ 35 °C recommended)
MaterialValve Body, PlateAluminium
Stainless steel		EN AW-6082 (3.2315)
AISI 316L (1.4404 or 1.4435)
 Shaft AISI 316L (1.4404 or 1.4435)
SealFeedthrough FKM (others on request)
Feedthrough  Rotating shaft, direct driven
Mounting Position  Any (shaft on pump side recommended)
    
   DN 25...        DN 320
Max. differential pressureOn the plate 1000 mbar...        75 mbar
ConductanceMolecular flow 22 ls-1...        27000 ls-1
Miniumum controllable conductanceMolecular flow 0.15 ls-1...        6 ls-1
Typical closing or opening time
"position only" version		Aluminium, Stainless steel 0.09 s...        0.29 s
WeightAluminium valve
Stainless steel valve		 2.0 kg (4.40 lbs)
2.5 kg (5.5 lbs)		...        10.4 kg (23 lbs)
12.3 (27.1 lbs)

 

 

1) Maximum values depending on operating conditions and sealing materials.

Leaflet 61.3 Butterfly Control Valve

PDF 4.86 MB
Specify standard product

Get to the product details to specify your requirements to get a quote or to get a specific CAD data download.

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KAAE-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS

Interface: Logic (A/D) / 2 sensors

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KAAF-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS

Interface: Profibus / 2 sensors

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KAAH-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS

Interface: RS232 interface / 2 sensors

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KAAK-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS

Interface: RS485 interface / 2 sensors

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KAAN-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS

Interface: CC-Link / 2 sensors

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KAAQ-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS

Interface: DeviceNet / 2 sensors

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KAAX-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS

Interface: EtherCAT / 2 sensors

61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Art. no. 61328-KACE-0001

Size: DN 25 (1")

Material: Aluminum

Actuator: Stepper motor

Flange: ISO-KF

Controller: SPS and PFO

Interface: Logic (A/D) / 2 sensors

Customized Solution

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