Sub-Fab Systems

Sub-fab processes can be challenging: corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can all severely affect the functionality and reliability of vacuum valves. Key functions of vacuum valves include: Prevention of backflow contamination, flow rate control and pump isolation.

Reliability, safety and availability are therefore the decisive success criteria here for vacuum valves used in sub-fab processes. Based on the experience of thousands of vacuum valve installations in sub-fab processes worldwide, the comprehensive and proven VAT vacuum valve portfolio addresses all sub-fab requirements.

To find out more about how a VAT vacuum valve solution can help to address sub-fab system issues, please select from the products listed below.

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Sub-Fab Systems

HV Gate Valve with Wedge Design

HV Gate Valve with Protection Ring

HV Gate Valve with Wedge Design

Gate Valve

HV Cylinder Valve (Angle Version)

HV Cylinder Valve (Inline Version)

HV Cylinder Valve (3/2 Way Version)

Edge Welded Metal Bellows