Outstanding Pressure Control and Isolation Under All Conditions

The 61.6 HV Control Butterfly Valve delivers outstandingpressure control and isolation performance. With its fastand precise acting motion controller (0.45 s) it’s the perfectsolution for fine control and isolation in CVD processes.The plate acts as a throttling element and varies theconductance of the valve opening. The integrated pressurecontroller of the 61.6 calculates the required plate positionto achieve the set pressure as fast as possible.

The 61.6 series isolation function is specially designedto avoid the characteristic higher seal wear of butterflyvalves. With it out-of-center plate shaft and the specialgeometry of the valve body and seal seat, seal friction isminimized and the sealing performance is increased.

Already installed in thousands of demanding applicationsunder various process conditions, the 61.6 series hasproven its outstanding reliability. With a robust designand direct mounting option, as well as reduced and easymaintenance, the 61.6 series convinces in all aspects.

Various design options in body material, surface treatment,elastomers, flange connections, sealing material, specialsizes as well as special control algorithms (adaptive, fix PIdown-stream/soft-pump) simplify the integration of the61.6 series into various vacuum applications.

VAT
VAT
Control
VAT
Isolation

61.6 HV Control Butterfly Valves are available inhard anodized aluminium or stainless steel withstandard flange connectors in ISO-KF and ISO-F.Customer-specific flanges can be integrated, aswell as special features like integrated heater withinsulation. FFKM/FKM elastomers are available onrequest (FKM is standard).

Main features of the 61.6 HV Butterfly Control and Isolation Valve

Features:

    • Excellent pressure control and isolation
    • Very fast operation
    • On-board software for local operation
    • Reliable operation in harsh process conditions

Benefits:

    • Better process controllability
    • High uptime / unrestricted performance
    • Low cost of operation
  • Technical data
  • Downloads
Sizes 

DN 40 (1 ½"), DN 50 (2"), DN 63 (2 ½"),
DN 80 (3"), DN 100 (4")

Actuator Integrated Controller with Stepper Motor, field oriented control (foc)
Body Material Hard anodized Aluminum or Stainless Steel
Standard Flanges ISO-KF, ISO-F
Leak Rate: Valve BodyHard anodized Aluminum
Stainless Steel		< 1 × 10-5 mbar ls-1
< 1 × 10-9 mbar ls-1
Leak Rate: Valve SeatHard anodized Aluminum
Stainless Steel		< 1 × 10-4 mbar ls-1
< 1 × 10-9 mbar ls-1
Pressure RangeHard anodized Aluminum
Stainless Steel		< 1 × 10-6 mbar to 1.2 bar (abs)
< 1 × 10-8 mbar to 1.2 bar (abs)
Cycles until First Service1)Pressure Control
Isolation
 		2 million
250 000 (DN 40 - 50)
100 000 (DN 63 - 100)
TemperatureValve Body
Controller		≤ 120 °C
Max. 50°C (≤ 35 °C recommended)
MaterialAlu Valve Body/Plate
SS Valve Body/Shaft		EN AW-6082 (3.2315)
AISI 316L (1.4404 or 1.4435)
SealPlate
Feedthrough		FKM
FKM
Feedthrough Rotary Feedthrough
Mounting Position Valve Seat towards Chamber

 

1) Maximum values depending on operating conditions and sealing materials

 

Leaflet 61.6 HV Butterfly Control and Isolation Valve

PDF 4.85 MB
Specify standard product

Get to the product details to specify your requirements to get a quote or to get a specific CAD data download.

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAE-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: Logic (A/D) / 2 sensors

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAF-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: Profibus / 2 sensors

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAH-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: RS232 interface / 2 sensors

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAK-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: RS485 interface / 2 sensors

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAN-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: CC-Link / 2 sensors

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAQ-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: DeviceNet / 2 sensors

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAX-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: EtherCAT / 2 sensors

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Art. no. 61632-KEAZ-0001

Size: DN 40 (1 ½")

Material: Stainless steel

Flange: ISO-KF

Controller: SPS

Interface: Ethernet / 2 sensors

Customized Solution

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