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Series

05.2 HV Transfer Insert with L-VAT

  • 05.2 - HV Transfer Insert with L-VAT
  • 05.2 - HV Transfer Insert with L-VAT
05.2 - HV Transfer Insert with L-VAT
05.2 - HV Transfer Insert with L-VAT
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Series

05.2 HV Transfer Insert with L-VAT

Article number
05210-CA24
1 × 10-9 mbar to 1.2 bar (abs)

For Load Lock and Process Chamber Isolation

  • Technical data
  • Downloads
Size
46 x 236 mm (1.81" x 9.29")
Flange
Special
Material
Aluminum
Actuator
Pneumatic: double acting
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-9 mbar
Pressure Max.
1.1 bar (abs)
Conductance
9 ls⁻¹
Differential Pressure on Plate
1.1 bar
Differential Pressure at opening
≤ 0.03 bar
Max. temperature position indicator
≤ 80 °C
Close open time
≤ 1.0 sec
Weight
14 kg / 31 lbs
Max. Temperature Actuator
≤ 80 °C
Max. temperature valve body
≤ 120 °C
Add-Ons for Your Product
Insert
Gate
Actuator

05.2 HV Transfer Insert with L-VAT 05210-CA24 Product Datasheet

PDF 98.50 KB

05.2 HV Transfer Insert with L-VAT 05210-CA24 Manual

PDF 1.35 MB

05.2 HV Transfer Insert with L-VAT 05210-CA24 2D Dimension Drawing

PDF 288.41 KB

052_HV_Transfer_Insert_with_L_VAT_05210_CA24_3D_CAD_File-474446.zip

ZIP 1.88 MB

Spare parts

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